X. Detter

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Active since

2003

Affiliations

Laboratoire d'Électronique des Technologies de l'Information(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Laboratoire des Technologies de la Microélectronique

CEA Grenoble

Centre National de la Recherche Scientifique

X. Detter is an author at Laboratoire d'Électronique des Technologies de l'Information specializing in semiconductor devices, materials engineering, and engineering.

Publications per year

2003–2003

Publications

Impact of chemistry on profile control of resist masked silicon gates etched in high density halogen-based plasmas

X. Detter, R. Palla, I. Thomas-Boutherin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 49 citations

Engineering, Materials Engineering, Materials Science +17

Chemical topography analyses of silicon gates etched in HBr/Cl2/O2 and HBr/Cl2/O2/CF4 high density plasmas

L. Vallier, J. Foucher, X. Detter et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 27 citations

Engineering, Materials Engineering, Materials Science +17

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