Edward Engbrecht

Statistics

Publications

Citations

364

H-Index

Active since

2001

Affiliations

The University of Texas at Austin(Current)

IBM (United States)

Edward Engbrecht is an author at The University of Texas at Austin specializing in materials science, electronic materials, and materials engineering.

Publications per year

2001–2016

Publications

High performance 14nm SOI FinFET CMOS technology with 0.0174µm <sup>2</sup> embedded DRAM and 15 levels of Cu metallization

C-H. Lin, B. Greene, J. Cai et al. · 2014 · 129 citations

Engineering, Computer Engineering, Electrical Engineering +9

22nm High-performance SOI technology featuring dual-embedded stressors, Epi-Plate High-K deep-trench embedded DRAM and self-aligned Via 15LM BEOL

P. Chang, C. Ortolland, David Fried et al. · 2012 · 89 citations

Engineering, Computer Engineering, Electrical Engineering +17

Low temperature chemical vapor deposition of tungsten carbide for copper diffusion barriers

Yong Sun, S.Y Lee, A.M Lemonds et al. · Thin Solid Films · 2001 · 55 citations

Natural Sciences, Materials Engineering, Materials Science +14

Chemical vapor deposition growth and properties of TaCxNy

Edward Engbrecht, Yong Sun, Stephen D. Smith et al. · Thin Solid Films · 2002 · 34 citations

Natural Sciences, Materials Engineering, Materials Science +8

Ti and NiPt/Ti liner silicide contacts for advanced technologies

Praneet Adusumilli, Emre Alptekin, M. Raymond et al. · 2016 · 31 citations

Engineering, Electrical Engineering, Materials Science +14

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