Concepedia

A.M Lemonds

AL

Statistics

Publications

5

Citations

138

H-Index

5

Active since

2001

Affiliations

The University of Texas at Austin(Current)

A.M Lemonds is an author at The University of Texas at Austin specializing in materials science, natural sciences, and materials engineering.

Publications per year

2001–2005

5

Publications

5

Low temperature chemical vapor deposition of tungsten carbide for copper diffusion barriers

Yong Sun, S.Y Lee, A.M Lemonds et al. · Thin Solid Films · 2001 · 55 citations

Natural Sciences, Materials Engineering, Materials Science +14

Characterization of and imprint results using indium tin oxide-based step and flash imprint lithography templates

William J. Dauksher, Kevin J. Nordquist, David P. Mancini et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 43 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15

Surface science investigations of atomic layer deposition half-reactions using TaF 5 and Si 2 H 6

A.M Lemonds, J.M. White, John G. Ekerdt · Surface Science · 2003 · 17 citations

Natural Sciences, Chemistry, Materials Science +15

Atomic layer deposition of TaSix thin films on SiO2 using TaF5 and Si2H6

A.M Lemonds, T. Bolom, Wesley James Ahearn et al. · Thin Solid Films · 2005 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +14

Surface chemistry of TaCl5 on polycrystalline Ta

A.M Lemonds, J.M. White, John G. Ekerdt · Surface Science · 2003 · 10 citations

Natural Sciences, Materials Engineering, Materials Science +10

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