Concepedia

Surface chemistry of TaCl5 on polycrystalline Ta

A.M Lemonds, J.M. White, John G. Ekerdt

Surface Science · 2003 · 10 citations · 14 references

DOI

Concepts

References

14

Handbook of X-Ray Photoelectron Spectroscopy

J. F. Moulder · Medical Entomology and Zoology · 1995 · 23.7K citations

, , +10

X-Ray photoelectron and auger electroo forward scattering: A new tool for surface crystallography

W. F. Egelhoff · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 1990 · 349 citations

, , +17

Plasma-enhanced atomic layer deposition of Ta and Ti for interconnect diffusion barriers

S. M. Rossnagel, Arthur Sherman, Frederick T. Turner · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 166 citations

, , +17

Controlled Growth of TaN, Ta<sub>3</sub>N<sub>5</sub>, and TaO<i><sub>x</sub></i>N<i><sub>y</sub></i> Thin Films by Atomic Layer Deposition

Mikko Ritala, Pia Kalsi, Diana Riihelä et al. · Chemistry of Materials · 1999 · 158 citations

, , +17

The crystal structure of NbCl<sub>5</sub>

A. Zalkin, Donald E. Sands · Acta Crystallographica · 1958 · 138 citations

, , +15