Frederick T. Turner

Statistics

Publications

Citations

187

H-Index

Active since

1974

Affiliations

Varian Medical Systems (United States)(Current)

Frederick T. Turner is an author at Varian Medical Systems (United States) specializing in engineering, solar cell materials, and electromagnetic compatibility.

Top concepts

EngineeringAntennaThin FilmsApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsThin Film DevicesSurface TechnologySolar Cell Materials

Publications per year

1974–2000

Publications

Plasma-enhanced atomic layer deposition of Ta and Ti for interconnect diffusion barriers

S. M. Rossnagel, Arthur Sherman, Frederick T. Turner · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 166 citations

Materials Science, Surface Technology, Interconnect Diffusion Barriers +13

The role of dc self-bias potential in the control of rf sputtering

Lawrence T. Lamont, Frederick T. Turner · Journal of Vacuum Science and Technology · 1974 · 21 citations

Electrical Engineering, Engineering, Radio Frequency +11

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