S. Borel

Novel 3D integration process for highly scalable Nano-Beam stacked-channels GAA (NBG) FinFETs with HfO2/TiN gate stack

T. Ernst, C. Dupré, Christian Isheden et al. · 2006 · 61 citations

Engineering, Hfo2/tin Gate Stack, Finfet Process +19

Highly performant double gate MOSFET realized with SON process

S. Harrison, P. Coronel, F. Leverd et al. · 2004 · 54 citations

Electrical Engineering, Engineering, Son Process +10

Hydrogen annealing of arrays of planar and vertically stacked Si nanowires

E. Dornel, T. Ernst, J.-Ch. Barbé et al. · Applied Physics Letters · 2007 · 50 citations

Engineering, Nanodevices, Si Nanowires +25

Emerging silicon-on-nothing (SON) devices technology

S. Monfray, T. Skotnicki, C. Fenouillet-Béranger et al. · Solid-State Electronics · 2004 · 48 citations

Electrical Engineering, Engineering, Devices Technology +5

Isotropic etching of SiGe alloys with high selectivity to similar materials

S. Borel · Microelectronic Engineering · 2004 · 35 citations

Materials Engineering, Materials Science, Engineering +10