Concepedia
Statistics
Publications
8
Citations
150
H-Index
Active since
1997
Affiliations
KU Leuven(Current)
IMEC
Filip Lanckmans is an author at KU Leuven specializing in materials science, natural sciences, and materials engineering.
Publications per year
1997–2012
A comparative study of copper drift diffusion in plasma deposited a-SiC:H and silicon nitride
Filip Lanckmans, William D. Gray, Bert Brijs et al. · Microelectronic Engineering · 2001 · 33 citations
Natural Sciences, Materials Engineering, Materials Science +16
Use of a capacitance voltage technique to study copper drift diffusion in (porous) inorganic low-k materials
Filip Lanckmans, Karen Maex · Microelectronic Engineering · 2002 · 25 citations
Diffusion barrier integrity and electrical performance of Cu/porous dielectric damascene lines
Francesca Iacopi, Zs. Tôkei, Michele Stucchi et al. · IEEE Electron Device Letters · 2003 · 21 citations
Natural Sciences, Electrical Engineering, Materials Science +17
Characterization of WF6/N2/H2 plasma enhanced chemical vapor deposited WxN films as barriers for Cu metallization
Hua Li, Sing Jin, H. Bender et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 20 citations
Natural Sciences, Materials Engineering, Materials Science +17
Porous Interfaces as Crack Deflecting Interlayers in Ceramic Laminates
W.J. Clegg, K.S. Blanks, J.B. Davis et al. · Key engineering materials · 1997 · 17 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +14
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