Use of a capacitance voltage technique to study copper drift diffusion in (porous) inorganic low-k materials

Diffusion of Metals in Silicon Dioxide

J. D. McBrayer, R.M. Swanson, T. W. Sigmon · Journal of The Electrochemical Society · 1986 · 528 citations

Natural Sciences, Materials Engineering, Materials Science +17

Multilevel interconnections for ULSI and GSI era

S. P. Murarka · Materials Science and Engineering R Reports · 1997 · 350 citations

Engineering, Computer Engineering, Electrical Engineering +14

Diffusion of metals in polymers

Franz Faupel, R. Willecke, Axel Thran · Materials Science and Engineering R Reports · 1998 · 263 citations

Natural Sciences, Materials Engineering, Materials Science +10

Copper Transport in Thermal SiO2

Yosi Shacham‐Diamand, A. Dedhia, D. Hoffstetter et al. · Journal of The Electrochemical Society · 1993 · 241 citations

Engineering, Materials Engineering, Materials Science +17

Properties of a ‐ SiO x  :  H  Thin Films Deposited from Hydrogen Silsesquioxane Resins

Mark J. Loboda, Christopher Grove, R. F. Schneider · Journal of The Electrochemical Society · 1998 · 175 citations

Natural Sciences, Materials Engineering, Materials Science +17