9
Publications
561
Citations
9
H-Index
1989
Active since
Affiliations
R. Willecke is an author at Christian-Albrechts-Universität zu Kiel specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringMaterial ScienceApplied PhysicsPolymer ScienceChemistryPolymer ChemistryPhysicsPolymersInstrumentationChemical Kinetics
Publications per year
1989–1998
9
9
Franz Faupel, P. W. Hüppe, Klaus Rätzke et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 40 citations · Full text
Engineering, Electron-beam Lithography, Ion-beam Sputtering +20
Rows per page
1–5 of 9