Concepedia

A. J. Speth

AJ

Statistics

Publications

7

Citations

179

H-Index

7

Active since

1965

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

A. J. Speth is an author at IBM Research - Thomas J. Watson Research Center specializing in microfabrication, engineering, and materials science.

Publications per year

1965–1990

7

Publications

7

EFFECTS OF LOW-ENERGY ELECTRON IRRADIATION ON Si-INSULATED GATE FETs

A. J. Speth, F. F. Fang · Applied Physics Letters · 1965 · 38 citations

Engineering, Electrical Engineering, Physics +15

Electron-beam lithography using vector-scan techniques

A. J. Speth, A.D. Wilson, A. Kern et al. · Journal of Vacuum Science and Technology · 1975 · 36 citations

Engineering, Electrical Engineering, Microelectronics +10

1 &#181;m MOSFET VLSI technology: Part VI&#8212;Electron-beam lithography

W. D. Grobman, H.E. Luhn, T.P. Donohue et al. · IEEE Transactions on Electron Devices · 1979 · 34 citations

Engineering, Computer Engineering, Electrical Engineering +16

Polymeric Optical Waveguides

Jean M. Hagerhorst-Trewhella, Jeffrey D. Gelorme, Bingfeng Fan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 28 citations

Natural Sciences, Materials Engineering, Materials Science +17

Scanning Electron Beam Lithography for Fabrication of Magnetic Bubble Circuits

T. H. P. Chang, M. Hatzakis, A.D. Wilson et al. · IBM Journal of Research and Development · 1976 · 17 citations

Engineering, Materials Engineering, Materials Science +17

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