Concepedia

M. Hatzakis

MH

38

Publications

1.6K

Citations

21

H-Index

1968

Active since

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

IBM (United States)

National Centre of Scientific Research "Demokritos"

M. Hatzakis is an author at IBM Research - Thomas J. Watson Research Center specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsChemistryMicrofabricationPhysicsElectrical EngineeringNanoelectronicsOptoelectronics

Publications per year

1968–1997

38

Publications

38

Single-Step Optical Lift-Off Process

M. Hatzakis, B. J. Canavello, Jane M. Shaw · IBM Journal of Research and Development · 1980 · 210 citations

Optical Materials, Engineering, ®Az Resist +17

Electron Resists for Microcircuit and Mask Production

M. Hatzakis · Journal of The Electrochemical Society · 1969 · 195 citations

Materials Science, Electronic Devices, Mask Production +15

High-resolution Positive Resists for Electron-beam Exposure

Istvan Haller, M. Hatzakis, R. Srinivasan · IBM Journal of Research and Development · 1968 · 177 citations

Materials Science, Engineering, Electronic Materials +14

Batch-fabricated thin-film magnetic recording heads

L. T. Romankiw, Ian M. Croll, M. Hatzakis · IEEE Transactions on Magnetics · 1970 · 94 citations

Engineering, Electron-beam Lithography, Magnetism +18

Copolymers of Methyl Methacrylate and Methacrylic Acid and Their Metal Salts as Radiation Sensitive Resists

Ivan Haller, Ralph Feder, M. Hatzakis et al. · Journal of The Electrochemical Society · 1979 · 75 citations · Full text

Engineering, Chemistry, Polymers +18

Rows per page

1–5 of 38