Morio Hosoya

Depth Profile Measurement by Secondary Ion Mass Spectrometry for Determining the Tracer Diffusivity of Oxygen in Rutile

Minoru Arita, Morio Hosoya, Masayuki Kobayashi et al. · Journal of the American Ceramic Society · 1979 · 76 citations

Natural Sciences, Materials Engineering, Materials Science +14

Mask defect inspection using an extreme ultraviolet microscope

Kazuhiro Hamamoto, Y. Tanaka, S. Y. Lee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 29 citations

Natural Sciences, Materials Engineering, Materials Science +14

Cleaning of extreme ultraviolet lithography optics and masks using 13.5nm and 172nm radiation

Kazuhiro Hamamoto, Y. Tanaka, Takeo Watanabe et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 28 citations

Natural Sciences, Materials Science, Optical Materials +13

Aerial Image Mask Inspection System for Extreme Ultraviolet Lithography

Hiroo Kinoshita, Kazuhiro Hamamoto, Nobuyuki Sakaya et al. · Japanese Journal of Applied Physics · 2007 · 21 citations

Natural Sciences, Chemistry, Microfabrication +12

Fine Pattern Replication by EUV Lithography.

Kazuhiro Hamamoto, Takeo Watanabe, Harushige Tsubakino et al. · Journal of Photopolymer Science and Technology · 2001 · 18 citations · Full text

Natural Sciences, Materials Science, Physics +11