Noriyuki Hirayanagi

<title>Nikon EB stepper: its system concept and countermeasures for critical issues</title>

Kazuaki Suzuki, Tomoharu Fujiwara, Kazunari Hada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 31 citations

Critical Issues, Engineering, Electron-beam Lithography +17

Comparison of Axial High-Resolution CT and Thin-Section Multiplanar Reformation (MPR) for Diagnosis of Diseases of the Pulmonary Parenchyma

Hiroaki Arakawa, Kaoru Sasaka, Wo Meng Lu et al. · Journal of Thoracic Imaging · 2004 · 30 citations

A novel simple sub-15nm line-and-space patterning process flow using directed self-assembly technology

Yuriko Seino, Yusuke Kasahara, Katsutoshi Kobayashi et al. · Microelectronic Engineering · 2015 · 14 citations

Engineering, Microfabrication, Self-assembly +6

Direct measurement of Coulomb effects in electron beam projection lithography

Takehisa Yahiro, Shohei Suzuki, Takeshi Irita et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 13 citations

Engineering, Electron-beam Lithography, Microscopy +18

Impact of realistic source shape and flexibility on source mask optimization

Hajime Aoyama, Yasushi Mizuno, Noriyuki Hirayanagi et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 13 citations · Full text

Geometric Modeling, Hardware Security, Electrical Engineering +12