Concepedia

Takeshi Irita

TI

2

Publications

23

Citations

2

H-Index

1995

Active since

Affiliations

Nikon (Japan)(Current)

Takeshi Irita is an author at Nikon (Japan) specializing in optoelectronics, microelectronics, and applied physics.

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Publications per year

1995–2001

2

Publications

2

Direct measurement of Coulomb effects in electron beam projection lithography

Takehisa Yahiro, Shohei Suzuki, Takeshi Irita et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 13 citations

, , +18

Fabrication of TE/TM Mode Splitter Using Completely Buried GaAs/GaAlAs Waveguide

Kazuya Okamoto, Masaaki Doi, Takeshi Irita et al. · Japanese Journal of Applied Physics · 1995 · 10 citations

, , +9

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