Concepedia

Takehisa Yahiro

TY

3

Publications

57

Citations

3

H-Index

1997

Active since

Affiliations

Nikon (Japan)(Current)

Takehisa Yahiro is an author at Nikon (Japan) specializing in microscopy, instrumentation, and engineering.

Top concepts

MicroscopyEngineeringInstrumentationEducationApplied PhysicsMicroelectronicsMicrofabricationPhysicsMedicineBiophysics

Publications per year

1997–2001

3

Publications

3

<title>Nikon EB stepper: its system concept and countermeasures for critical issues</title>

Kazuaki Suzuki, Tomoharu Fujiwara, Kazunari Hada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 31 citations

Critical Issues, Engineering, Electron-beam Lithography +17

Simultaneous optical detection techniques, interferometry, and optical beam deflection for dynamic mode control of scanning force microscopy

M. Hoummady, Etienne Farnault, Takehisa Yahiro et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 13 citations

Engineering, Microscopy, Microfabrication +15

Direct measurement of Coulomb effects in electron beam projection lithography

Takehisa Yahiro, Shohei Suzuki, Takeshi Irita et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 13 citations

Engineering, Electron-beam Lithography, Microscopy +18

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