Concepedia

Kazunari Hada

KH

3

Publications

83

Citations

3

H-Index

2000

Active since

Affiliations

Nikon (Japan)(Current)

Nikon (United States)

Kazunari Hada is an author at Nikon (Japan) specializing in applied physics, microfabrication, and engineering.

Top concepts

EngineeringApplied PhysicsMicroelectronicsMicrofabricationInstrumentationOptoelectronicsElectrical EngineeringEducationMicroscopyTechnology

Publications per year

2000–2008

3

Publications

3

Nikon EUVL development progress update

Takaharu Miura, Katsuhiko Murakami, Kazuaki Suzuki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 31 citations

Electrical Engineering, Engineering, Electron-beam Lithography +13

<title>Nikon EB stepper: its system concept and countermeasures for critical issues</title>

Kazuaki Suzuki, Tomoharu Fujiwara, Kazunari Hada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 31 citations

Critical Issues, Engineering, Electron-beam Lithography +17

Nikon EUVL development progress update

Takaharu Miura, Katsuhiko Murakami, Kazuaki Suzuki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 21 citations

Electrical Engineering, Engineering, Electron-beam Lithography +12

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