Etienne Farnault

Publications

Citations

H-Index

1997

Active since

Affiliations

Laboratory for Integrated Micro-Mechatronic Systems(Current)

Etienne Farnault is an author at Laboratory for Integrated Micro-Mechatronic Systems specializing in mechanical engineering, engineering, and applied physics.

Top concepts

EngineeringMechanical EngineeringMicroscopyApplied PhysicsMaterial ScienceMicrofabricationNanomechanicsInstrumentationOptical PropertiesMedicine

Publications per year

1997–2002

Publications

Enhanced sensitivity to force gradients by using higher flexural modes of the atomic force microscope cantilever

M. Hoummady, Etienne Farnault · Applied Physics A · 1998 · 36 citations

Materials Science, Higher Flexural Modes, Engineering +13

Silicon Nitride Thin Films Young's Modulus Determination by an Optical Non Destructive Method

L. Buchaillot, Etienne Farnault, M. Fujita · Japanese Journal of Applied Physics · 1997 · 33 citations

Optical Materials, Engineering, Microscopy +20

Simultaneous optical detection techniques, interferometry, and optical beam deflection for dynamic mode control of scanning force microscopy

M. Hoummady, Etienne Farnault, Takehisa Yahiro et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 13 citations

Engineering, Microscopy, Microfabrication +15

Applications of dynamic techniques for accurate determination of silicon nitride Young's moduli

M. Hoummady, Etienne Farnault, Hideki Kawakatsu et al. · 2002 · 11 citations

Engineering, Micromechanics, Normal Displacement +16

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