Concepedia

Author

Etienne Farnault

Laboratory for Integrated Micro-Mechatronic Systems

Also Known As

E. Farnault, Etienne Farnault

12

Publications

102

Citations

4

H-Index

23

Concepts

All Affiliations

Laboratory for Integrated Micro-Mechatronic SystemsThe University of Tokyo
EF

About

Etienne Farnault is an author at Laboratory for Integrated Micro-Mechatronic Systems specializing in mechanical engineering, engineering, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

4

4

93

2

Applied Physics

3

3

80

3

Medicine

1

1

13

4

Biomedical Engineering

1

1

13

5

Materials Engineering

1

1

33

Etienne Farnault

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4

Publications

93

Citations

4

H-Index

YearCitations

Enhanced sensitivity to force gradients by using higher flexural modes of the atomic force microscope cantilever

M. Hoummady, Etienne Farnault

Applied Physics A

1998

36

Silicon Nitride Thin Films Young's Modulus Determination by an Optical Non Destructive Method

L. Buchaillot, Etienne Farnault, M. Fujita

Japanese Journal of Applied Physics

1997

33

Simultaneous optical detection techniques, interferometry, and optical beam deflection for dynamic mode control of scanning force microscopy

M. Hoummady, Etienne Farnault, Takehisa Yahiro,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

1997

13

Applications of dynamic techniques for accurate determination of silicon nitride Young's moduli

M. Hoummady, Etienne Farnault, Hideki Kawakatsu,

2002

11

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