Andreas Wolter

AeroMEMS sensor array for high-resolution wall pressure measurements

Andreas Berns, Ulrich Buder, Andreas Wolter et al. · Sensors and Actuators A Physical · 2006 · 94 citations

Aeroacoustics, Engineering, Measurement +8

Efficient simulation of light diffraction from three-dimensional EUV masks using field decomposition techniques

Andreas Erdmann, Christian K. Kalus, Thomas Schmoeller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 26 citations

Numerical Analysis, Engineering, Optic Design +23

Ion projection lithography below 70 nm: tool performance and resist process

Stefan Hirscher, M. Kümmel, Oliver Kirch et al. · Microelectronic Engineering · 2002 · 15 citations

Materials Science, Tool Performance, Engineering +11

Characterization of a process development tool for ion projection lithography

Hans Loeschner, G. Stengl, Rainer Kaesmaier et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 14 citations

Engineering, Electron-beam Lithography, Microscopy +21

Large-field ion optics for projection and proximity printing and for maskless lithography (ML2)

Hans Loeschner, G. Stengl, H. Buschbeck et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 11 citations

Optical Materials, Engineering, Electron-beam Lithography +20