Christian K. Kalus

A setup for resonant inelastic soft x-ray scattering on liquids at free electron laser light sources

Kristjan Kunnus, Ivan Rajković, Simon Schreck et al. · Review of Scientific Instruments · 2012 · 77 citations · Full text

Natural Sciences, Physics, Condensed Matter Physics +14

Efficient simulation of light diffraction from three-dimensional EUV masks using field decomposition techniques

Andreas Erdmann, Christian K. Kalus, Thomas Schmoeller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 26 citations

Computing, Computational Engineering, Electrical Engineering +16

Optimizing edge topography of alternating phase-shift masks using rigorous mask modeling

Christoph M. Friedrich, Leonhard Mader, Andreas Erdmann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 12 citations

Engineering, Materials Engineering, Digital Fabrication +13

Modification of boundaries conditions in the FDTD algorithm for EUV mask modeling

Alexandre Vial, Andreas Erdmann, Thomas Schmoeller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 12 citations

Computing, Computational Engineering, Materials Engineering +12

Proximity correction using computer aided proximity correction (CAPROX): Evaluation and application

M. Hintermaier, Uli Hofmann, B. Hübner et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 12 citations

Engineering, Electrical Engineering, Materials Science +11