Statistics
Publications
125
Citations
874
Authors
3
Location
Aachen, Germany
125
Martin Stuschke, Volker Budach, W Klaes et al. · International Journal of Radiation Oncology*Biology*Physics · 1992 · 36 citations
Medicine, Cancer Biology, Oncology +17
Comparison of simulation approaches for chemically amplified resists
Andreas Erdmann, Wolfgang Henke, Stewart A. Robertson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 30 citations
Natural Sciences, Materials Engineering, Materials Science +13
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