Stewart A. Robertson

Shot noise, LER, and quantum efficiency of EUV photoresists

Robert L. Brainard, Peter Trefonas, Jeroen H. Lammers et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 141 citations

Engineering, Electrical Engineering, Materials Science +13

Statistical simulation of photoresists at EUV and ArF

John J. Biafore, Mark D. Smith, Chris A. Mack et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 51 citations

Engineering, Materials Engineering, Materials Science +15

Comparison of simulation approaches for chemically amplified resists

Andreas Erdmann, Wolfgang Henke, Stewart A. Robertson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 30 citations

Natural Sciences, Materials Engineering, Materials Science +13

Resist pattern prediction at EUV

John J. Biafore, Mark D. Smith, Eelco van Setten et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 30 citations

Natural Sciences, Electrical Engineering, Materials Science +17

Negative tone development: gaining insight through physical simulation

Stewart A. Robertson, Michael T. Reilly, John J. Biafore et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 20 citations

Engineering, Materials Engineering, Materials Science +10