Statistics
Publications
3
Citations
122
H-Index
3
Active since
1985
Affiliations
Carnegie Mellon University(Current)
Michael T. Reilly is an author at Carnegie Mellon University specializing in materials engineering, natural sciences, and materials science.
Publications per year
1985–2011
3
3
Fundamental investigation of negative tone development (NTD) for the 22nm node (and beyond)
Guillaume Landié, Yongan Xu, Sean Burns et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 28 citations
Natural Sciences, Materials Engineering, Materials Science +13
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