Concepedia

Guillaume Landié

GL

3

Publications

80

Citations

3

H-Index

2010

Active since

Affiliations

STMicroelectronics (United States)(Current)

IBM (United States)

Toshiba (United States)

GlobalFoundries (United States)

Guillaume Landié is an author at STMicroelectronics (United States) specializing in engineering, applied physics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsOptoelectronicsMicroelectronicsMicrofabricationOptical MaterialsOptical PropertiesElectronic PackagingElectrical EngineeringNoise

Publications per year

2010–2012

3

Publications

3

Insertion strategy for EUV lithography

Obert R. Wood, John Arnold, Timothy A. Brunner et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 30 citations

Short Wavelength Optic, Optical Materials, Engineering +19

Fundamental investigation of negative tone development (NTD) for the 22nm node (and beyond)

Guillaume Landié, Yongan Xu, Sean Burns et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 28 citations

Optical Materials, Engineering, Chemistry +19

EUV lithography at the 22nm technology node

Obert R. Wood, Chiew-Seng Koay, Karen Petrillo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 22 citations

Technology Node, Electrical Engineering, Wafer Scale Processing +15

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