Statistics
Publications
1
Citations
14
H-Index
1
Active since
2001
Affiliations
Sigma Engineering (Germany)(Current)
Robert Wildfeuer is an author at Sigma Engineering (Germany) specializing in device simulation, dissolution model fitting, and process window development.
Publications per year
2001–2001
1
1
Improved notch model for resist dissolution in lithography simulation
Stewart A. Robertson, Edward K. Pavelchek, W Hoppe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 14 citations
Engineering, Materials Engineering, Computational Materials Science +12
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