Leonhard Mader

A model for phosphorus segregation at the silicon-silicon dioxide interface

F. Lau, Leonhard Mader, C. Mazuré et al. · Applied Physics A · 1989 · 95 citations

Engineering, Materials Engineering, Materials Science +11

Determination of the Retarded Diffusion of Antimony by SIMS Measurements and Numerical Simulations

E. Guerrero, W. Jüngling, H. Pötzl et al. · Journal of The Electrochemical Society · 1986 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +16

Determination of silicon point defect parameters and reaction barrier energies from gold diffusion experiments

K. Ghaderi, G. Hobler, M. Budil et al. · Journal of Applied Physics · 1995 · 19 citations

Natural Sciences, Chemistry, Physics +17

Ion Beam Etching of Silicon Dioxide on Silicon

Leonhard Mader, J. Hoepfner · Journal of The Electrochemical Society · 1976 · 16 citations

Engineering, Electrical Engineering, Materials Science +14

Optimizing edge topography of alternating phase-shift masks using rigorous mask modeling

Christoph M. Friedrich, Leonhard Mader, Andreas Erdmann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 12 citations

Engineering, Materials Engineering, Digital Fabrication +13