M. Budil

Determination of silicon point defect parameters and reaction barrier energies from gold diffusion experiments

K. Ghaderi, G. Hobler, M. Budil et al. · Journal of Applied Physics · 1995 · 19 citations

Engineering, Silicon On Insulator, Defect Tolerance +17

A New Model of Anomalous Phosphorus Diffusion in Silicon

M. Budil, H. Pötzl, Gerhard Stingeder et al. · Materials science forum · 1989 · 15 citations

Engineering, Physics, Anomalous Phosphorus Diffusion +5

Simultaneous quantitative determination of the distribution of dopants in silicon by high mass resolution secondary ion mass spectrometry

Gerhard Stingeder, K. Piplits, S. Gara et al. · Analytical Chemistry · 1989 · 13 citations

Engineering, Biological Mass Spectrometry, Altmetric Attention Score +19

Simulation of oxygen precipitation in Czochralski grown silicon

M. Schrems, Thomas Brabec, M. Budil et al. · Materials Science and Engineering B · 1989 · 12 citations

Materials Engineering, Chemical Engineering, Engineering +6

Simulation of transient boron diffusion during rapid thermal annealing in silicon

Michael Heinrich, M. Budil, H. Pötzl · Journal of Applied Physics · 1991 · 11 citations

Engineering, Silicon On Insulator, Ion Implantation +17