E. Guerrero

Simulation of critical IC fabrication processes using advanced physical and numerical methods

W. Jüngling, P. Pichler, S. Selberherr et al. · IEEE Transactions on Electron Devices · 1985 · 134 citations

Engineering, Material Simulation, Critical Ic Fabrication +22

Generalized Model for the Clustering of As Dopants in Si

E. Guerrero, H. Pötzl, R. Tielert et al. · Journal of The Electrochemical Society · 1982 · 83 citations

Engineering, Equilibrium Saturation Concentration, Silicon On Insulator +16

Simulation of Critical IC-Fabrication Steps

P. Pichler, W. Jüngling, S. Selberherr et al. · IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 1985 · 60 citations

Numerical Analysis, General Formulation, Engineering +22

Determination of the Retarded Diffusion of Antimony by SIMS Measurements and Numerical Simulations

E. Guerrero, W. Jüngling, H. Pötzl et al. · Journal of The Electrochemical Society · 1986 · 26 citations

Materials Science, Sims Measurements, Engineering +14

Simulation of critical IC-fabrication steps

P. Pichler, W. Jüngling, S. Selberherr et al. · IEEE Transactions on Electron Devices · 1985 · 24 citations

Numerical Analysis, General Formulation, Engineering +22