R. Tielert

Generalized Model for the Clustering of As Dopants in Si

E. Guerrero, H. Pötzl, R. Tielert et al. · Journal of The Electrochemical Society · 1982 · 83 citations

Natural Sciences, Materials Science, Physics +16

Two-dimensional numerical simulation of impurity redistribution in VLSI processes

R. Tielert · IEEE Transactions on Electron Devices · 1980 · 46 citations

Engineering, Computer Engineering, Electrical Engineering +17

A pure CMOS surface micromachined integrated accelerometer

Christofer Hierold, Andreas Hildebrandt, U. Naher et al. · 2002 · 38 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16

Lifetimes and initial populations of foil-excited hydrogen and lithium states

H.H. Bukow, H. v. Buttlar, Derek A. Haas et al. · Nuclear Instruments and Methods · 1973 · 29 citations

Natural Sciences, Chemistry, Physics +10

Quantitative distribution analysis of dopant elements in silicon with SIMS for the improvement of process modelling

Gerhard Stingeder, M. Grasserbauer, E. Guerrero et al. · Fresenius Zeitschrift für Analytische Chemie · 1983 · 19 citations

Engineering, Materials Engineering, Materials Science +16