Concepedia

Thomas Schmoeller

TS

8

Publications

122

Citations

8

H-Index

2002

Active since

Affiliations

Synopsys (Germany)(Current)

IMEC

Sigma Engineering (Germany)

Synopsys (United States)

Fraunhofer Institute for Integrated Systems and Device Technology

Thomas Schmoeller is an author at Synopsys (Germany) specializing in applied physics, engineering, and microelectronics.

Top concepts

Publications per year

2002–2014

8

Publications

8

Efficient simulation of light diffraction from three-dimensional EUV masks using field decomposition techniques

Andreas Erdmann, Christian K. Kalus, Thomas Schmoeller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 26 citations

, , +23

Shadowing effect modeling and compensation for EUV lithography

Hua Song, Lena Zavyalova, Irene Su et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 25 citations

, , +17

Application of an inverse Mack model for negative tone development simulation

Weimin Gao, Ulrich Klostermann, Thomas Mülders et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 17 citations

, , +21

3D resist profile modeling for OPC applications

Yongfa Fan, Kar Kit Koh, Qing Yang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 12 citations

, , +16

Modification of boundaries conditions in the FDTD algorithm for EUV mask modeling

Alexandre Vial, Andreas Erdmann, Thomas Schmoeller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 12 citations

, , +22

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