Concepedia

Hua Song

HS

3

Publications

73

Citations

3

H-Index

2011

Active since

Affiliations

Synopsys (United States)(Current)

Hua Song is an author at Synopsys (United States) specializing in engineering, applied physics, and microelectronics.

Top concepts

EngineeringApplied PhysicsMicroelectronics3D PrintingOphthalmologyComputer EngineeringElectronic PackagingComputer-aided DesignDesign3D Modeling

Publications per year

2011–2015

3

Publications

3

Spacer-is-dielectric-compliant detailed routing for self-aligned double patterning lithography

Yuelin Du, Qiang Ma, Hua Song et al. · 2013 · 38 citations

Engineering, Pattern Transfer, Interconnect (Integrated Circuits) +16

Shadowing effect modeling and compensation for EUV lithography

Hua Song, Lena Zavyalova, Irene Su et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 25 citations

Oblique Illumination, Optical Materials, Engineering +17

Photoresist 3D profile related etch process simulation and its application to full chip etch compact modeling

Cheng‐En Wu, Wayne Yang, Lan Luan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 10 citations

Engineering, Electron-beam Lithography, 3D Modeling +18

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