Concepedia

Lena Zavyalova

LZ

10

Publications

175

Citations

10

H-Index

1998

Active since

Affiliations

Rochester Institute of Technology(Current)

Synopsys (Germany)

Synopsys (United States)

Lena Zavyalova is an author at Rochester Institute of Technology specializing in engineering, applied physics, and optical properties.

Top concepts

EngineeringApplied PhysicsOptical PropertiesOphthalmologyOptical SystemsOptoelectronicsMicroelectronicsElectronic PackagingPhysicsInstrumentation

Publications per year

1998–2013

10

Publications

10

Benefiting from polarization effects on high-NA imaging

Bruce W. Smith, Lena Zavyalova, Andrew Estroff · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 30 citations

Optical Materials, Engineering, Electron-beam Lithography +17

Shadowing effect modeling and compensation for EUV lithography

Hua Song, Lena Zavyalova, Irene Su et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 25 citations

Oblique Illumination, Optical Materials, Engineering +17

Approaching the numerical aperture of water immersion lithography at 193-nm

Bruce W. Smith, Anatoly Bourov, Yongfa Fan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 23 citations

Immersion lithography fluids for high NA 193 nm lithography

Jianming Zhou, Yongfa Fan, Anatoly Bourov et al. · Optical Microlithography XVIII · 2005 · 21 citations

Engineering, Electron-beam Lithography, Optical Testing +18

Immersion microlithography at 193 nm with a Talbot prism interferometer

Anatoly Bourov, Yongfa Fan, Frank Cropanese et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 17 citations

Compact Prism, Engineering, Microscopy +19

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