Concepedia

Yongfa Fan

YF

12

Publications

209

Citations

10

H-Index

1996

Active since

Affiliations

Rochester Institute of Technology(Current)

Synopsys (United States)

Yongfa Fan is an author at Rochester Institute of Technology specializing in engineering, applied physics, and ophthalmology.

Top concepts

EngineeringOphthalmologyApplied PhysicsMicrofabricationOptical PropertiesMaterial ScienceMedicineMicroscopyPhysicsPhotonics

Publications per year

1996–2013

12

Publications

12

Evanescent wave imaging in optical lithography

Bruce W. Smith, Yongfa Fan, Jianming Zhou et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 33 citations

Photonics, Engineering, Electron-beam Lithography +15

Doping competition of anions during the electropolymerization of pyrrole in aqueous solutions

Yongfang Li, Yongfa Fan · Synthetic Metals · 1996 · 31 citations

Materials Science, Conducting Polymer, Chemical Engineering +8

Approaching the numerical aperture of water immersion lithography at 193-nm

Bruce W. Smith, Anatoly Bourov, Yongfa Fan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 23 citations

Immersion lithography fluids for high NA 193 nm lithography

Jianming Zhou, Yongfa Fan, Anatoly Bourov et al. · Optical Microlithography XVIII · 2005 · 21 citations

Engineering, Electron-beam Lithography, Optical Testing +18

Immersion microlithography at 193 nm with a Talbot prism interferometer

Anatoly Bourov, Yongfa Fan, Frank Cropanese et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 17 citations

Compact Prism, Engineering, Microscopy +19

Rows per page

1–5 of 12