Maxime Argoud

Active Interposer Technology for Chiplet-Based Advanced 3D System Architectures

P. Coudrain, P. Chausse, L. Arnaud et al. · 2019 · 65 citations

Engineering, Computer Engineering, Computer Systems +17

The potential of block copolymer’s directed self-assembly for contact hole shrink and contact multiplication

Raluca Tiron, A. Gharbi, Maxime Argoud et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 50 citations

Engineering, Materials Engineering, Materials Science +17

300mm pilot line DSA contact hole process stability

Maxime Argoud, I. Servin, A. Gharbi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 26 citations

Engineering, Manufacturing Engineering, Materials Engineering +14

Scaling-down lithographic dimensions with block-copolymer materials: 10-nm-sized features with poly(styrene)-<i>block</i>-poly(methylmethacrylate)

Xavier Chevalier, Célia Nicolet, Raluca Tiron et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +17

PMMA removal options by wet development in PS-<i>b</i>-PMMA block copolymer for nanolithographic mask fabrication

Ahmed Gharbi, Raluca Tiron, Patricia Pimenta‐Barros et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2015 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +17