I. Servin

Statistics

Publications

Citations

166

H-Index

Active since

2010

Affiliations

Laboratoire d'Électronique des Technologies de l'Information(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

STMicroelectronics (France)

Arkema (France)

STMicroelectronics (Switzerland)

I. Servin is an author at Laboratoire d'Électronique des Technologies de l'Information specializing in engineering, microfabrication, and materials engineering.

Publications per year

2010–2015

Publications

Low leakage and low variability Ultra-Thin Body and Buried Oxide (UT2B) SOI technology for 20nm low power CMOS and beyond

F. Andrieu, O. Weber, J. Mazurier et al. · 2010 · 103 citations

Engineering, Computer Engineering, Electrical Engineering +17

300mm pilot line DSA contact hole process stability

Maxime Argoud, I. Servin, A. Gharbi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 26 citations

Engineering, Manufacturing Engineering, Materials Engineering +14

Etch challenges for DSA implementation in CMOS via patterning

Patricia Pimenta‐Barros, S. Barnola, A. Gharbi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 21 citations

Engineering, Chemical Engineering, Materials Engineering +16

DSA planarization approach to solve pattern density issue

Patricia Pimenta‐Barros, A. Gharbi, A Sarrazin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 16 citations

Engineering, Materials Engineering, Materials Science +16

1–4 of 4