Patricia Pimenta‐Barros

Statistics

Publications

Citations

404

H-Index

Active since

2014

Affiliations

Laboratoire d'Électronique des Technologies de l'Information(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

CEA Grenoble

Arkema (France)

Université Grenoble Alpes

Patricia Pimenta‐Barros is an author at Laboratoire d'Électronique des Technologies de l'Information specializing in engineering, materials science, and materials engineering.

ORCID

Publications per year

2014–2023

Publications

Vertically stacked-NanoWires MOSFETs in a replacement metal gate process with inner spacer and SiGe source/drain

Sylvain Barraud, V. Lapras, Marie-Pierre Samson et al. · 2016 · 110 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Atomic layer etching of GaN using Cl2 and He or Ar plasma

Simon Ruel, Patricia Pimenta‐Barros, Frédéric Le Roux et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2021 · 34 citations

Engineering, Electrical Engineering, Materials Science +17

Recent Developments and Prospects of Fully Recessed MIS Gate Structures for GaN on Si Power Transistors

Pedro Fernandes Paes Pinto Rocha, Laura Vauche, Patricia Pimenta‐Barros et al. · Energies · 2023 · 28 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

300mm pilot line DSA contact hole process stability

Maxime Argoud, I. Servin, A. Gharbi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 26 citations

Engineering, Manufacturing Engineering, Materials Engineering +14

PMMA removal options by wet development in PS-<i>b</i>-PMMA block copolymer for nanolithographic mask fabrication

Ahmed Gharbi, Raluca Tiron, Patricia Pimenta‐Barros et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2015 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +17

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