Ahmed Gharbi

Scaling-down lithographic dimensions with block-copolymer materials: 10-nm-sized features with poly(styrene)-<i>block</i>-poly(methylmethacrylate)

Xavier Chevalier, Célia Nicolet, Raluca Tiron et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +17

Probing Self-Assembly of Cylindrical Morphology Block Copolymer Using in Situ and ex Situ Grazing Incidence Small-Angle X-ray Scattering: The Attractive Case of Graphoepitaxy

M. Maret, Raluca Tiron, Xavier Chevalier et al. · Macromolecules · 2014 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +17

PMMA removal options by wet development in PS-<i>b</i>-PMMA block copolymer for nanolithographic mask fabrication

Ahmed Gharbi, Raluca Tiron, Patricia Pimenta‐Barros et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2015 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +17

Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line

Isabelle Servin, Raluca Tiron, Ahmed Gharbi et al. · Japanese Journal of Applied Physics · 2014 · 23 citations

Engineering, Materials Engineering, Materials Science +17

PMMA removal selectivity to polystyrene using dry etch approach

A Sarrazin, N. Possémé, Patricia Pimenta‐Barros et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2016 · 16 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17