Isabelle Servin

Statistics

Publications

Citations

101

H-Index

Active since

2014

Affiliations

Commissariat à l'Énergie Atomique et aux Énergies Alternatives(Current)

Laboratoire d'Électronique des Technologies de l'Information

Université Grenoble Alpes

Centre National de la Recherche Scientifique

CEA Grenoble

Isabelle Servin is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in etching processes, materials engineering, and materials science.

ORCID

Publications per year

2014–2023

Publications

PMMA removal options by wet development in PS-<i>b</i>-PMMA block copolymer for nanolithographic mask fabrication

Ahmed Gharbi, Raluca Tiron, Patricia Pimenta‐Barros et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2015 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +17

Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line

Isabelle Servin, Raluca Tiron, Ahmed Gharbi et al. · Japanese Journal of Applied Physics · 2014 · 23 citations

Engineering, Materials Engineering, Materials Science +17

Chitosan as a Water-Developable 193 nm Photoresist for Green Photolithography

Olha Sysova, Paule Durin, Corinne Gablin et al. · ACS Applied Polymer Materials · 2022 · 19 citations · Full text

Engineering, Materials Engineering, Materials Science +14

Ready for multi-beam exposure at 5kV on MAPPER tool: lithographic and process integration performances of advanced resists/stack

Isabelle Servin, Ndeye Thiam, Patricia Pimenta‐Barros et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 16 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Water-soluble bio-sourced resists for DUV lithography in a 200/300 mm pilot line environment

Isabelle Servin, Alexandre Teolis, A. Bazin et al. · Micro and Nano Engineering · 2023 · 10 citations · Full text

Engineering, Materials Engineering, Materials Science +16

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