Concepedia
Statistics
Publications
3
Citations
39
H-Index
Active since
2022
Affiliations
CEA Grenoble(Current)
École Centrale de Lyon
Centre National de la Recherche Scientifique
École d'Ingénieurs en Chimie et Sciences du Numérique
Université de Strasbourg
Olha Sysova is an author at CEA Grenoble specializing in surface modification, etching processes, and materials engineering.
Publications per year
2022–2023
Chitosan as a Water-Developable 193 nm Photoresist for Green Photolithography
Olha Sysova, Paule Durin, Corinne Gablin et al. · ACS Applied Polymer Materials · 2022 · 19 citations · Full text
Engineering, Materials Engineering, Materials Science +14
Water-soluble bio-sourced resists for DUV lithography in a 200/300 mm pilot line environment
Isabelle Servin, Alexandre Teolis, A. Bazin et al. · Micro and Nano Engineering · 2023 · 10 citations · Full text
Engineering, Materials Engineering, Materials Science +16
Green deep‐UV photoresist based on chitosan for microelectronics
Olha Sysova, Paule Durin, Corinne Gablin et al. · Journal of Applied Polymer Science · 2023 · 10 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +14
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