Publication | Closed Access
On the design of piezoelectric MEMS scanning mirror for large reflection area and wide scan angle
28
Citations
38
References
2022
Year
Electrical EngineeringEngineeringMicrofabricationLarge Reflection AreaWide Scan AngleMechanical EngineeringPiezoelectric MemsPiezoelectricityPiezoelectric MaterialUltrasoundInstrumentationMicroelectronicsGraded-reflectivity MirrorsMicro-electromechanical SystemMicromachined Ultrasonic Transducer
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