Mems Mirrors

MEMS Mirrors is a micro-electromechanical system-based optical device that enables precise, controllable reflection or steering of light beams through miniaturized, movable mirror structures fabricated using semiconductor-compatible processes.

605

Publications

19.8K

Citations

2K

Authors

479

Institutions

Publications per year

2017–2026

131

Variants

Micro-electromechanical Systems Mirrors

Authors

2K

  1. HX
    Huikai Xie

    University of Florida, United States

    41 publications · 1.2K citations

    21

    h-index

  2. HS
    Harald Schenk

    Fraunhofer Institute for Photonic Microsystems, Germany

    29 publications · 822 citations

    18

    h-index

  3. TG
    Thomas G. Bifano

    Boston University, United States

    19 publications · 528 citations

    14

    h-index

  4. PB
    Paul Bierden

    Boston Micromachines (United States), United States

    13 publications · 460 citations

    12

    h-index

  5. TS
    Thilo Sandner

    Fraunhofer Institute for Photonic Microsystems, Germany

    15 publications · 318 citations

    12

    h-index

1–5 of 2K

Venues

  1. Journal of Microelectromechanical Systems

    51 publications · 2.2K citations

    28

    h-index

  2. Sensors and Actuators A Physical

    41 publications · 1.3K citations

    25

    h-index

  3. 23

    h-index

  4. Optics Express

    38 publications · 1.4K citations

    22

    h-index

  5. Micromachines

    21 publications · 720 citations

    16

    h-index

1–5