Mems Mirrors
MEMS Mirrors is a micro-electromechanical system-based optical device that enables precise, controllable reflection or steering of light beams through miniaturized, movable mirror structures fabricated using semiconductor-compatible processes.
605
Publications
19.8K
Citations
2K
Authors
479
Institutions
Publications per year
2017–2026
131
Variants
Micro-electromechanical Systems Mirrors
605
Optomechanical Entanglement between a Movable Mirror and a Cavity Field
David Vitali, Sylvain Gigan, Aires Ferreira et al. · Physical Review Letters · 2007 · 1.2K citations · Full text
Natural Sciences, Physics, Optics +13
Radiation-pressure cooling and optomechanical instability of a micromirror
O. Arcizet, P.-F. Cohadon, T. Briant et al. · Nature · 2006 · 928 citations · Full text
Engineering, Electrical Engineering, Mechanical Engineering +14
Flexible mirror micromachined in silicon
Gleb Vdovin, P.M. Sarro · Applied Optics · 1995 · 176 citations
1–5 of 605
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479
University of Florida
Gainesville, United States
20 h-index
108 publications
2.9K citations
University of California, Berkeley
Berkeley, United States
20 h-index
71 publications
3K citations
Fraunhofer Institute for Photonic Microsystems
Dresden, Germany
18 h-index
127 publications
2.6K citations
Boston University
Boston, United States
14 h-index
39 publications
1.1K citations
Fraunhofer Institute for Silicon Technology
Itzehoe, Germany
14 h-index
98 publications
3.3K citations
Boston Micromachines (United States)
Cambridge, United States
12 h-index
32 publications
832 citations

Chinese Academy of Sciences
Beijing, China
12 h-index
43 publications
1.2K citations

Beijing Institute of Technology
Beijing, China
11 h-index
32 publications
688 citations
1–8 of 479
51 publications · 2.2K citations
28
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41 publications · 1.3K citations
25
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102 publications · 2.2K citations
23
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38 publications · 1.4K citations
22
h-index
21 publications · 720 citations
16
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