Concepedia

IIIB-7 evidence of hole flow in silicon nitride for positive gate voltage

Fu‐Tai Liou, Shih-ou Chen

IEEE Transactions on Electron Devices · 1984 · 15 citations · 0 references

Concepts

EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsDevice CharacterizationMetal-oxide-semiconductor Field-effect TransistorsSemiconductor Device MaterialsSemiconductor InterfacesSemiconductor PhysicsShort-channel EffectsGate LeakageGate Leakage CurrentGate Oxide LeakageHole TransportNitride PassivationNitride Thin FilmsSiliconSilicon Nitride