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Surface action mechanism and planarization effect of sarcosine as an auxiliary complexing agent in copper film chemical mechanical polishing

Materials ScienceChemical EngineeringAuxiliary Complexing AgentEngineeringSurface FunctionalizationCorrosionSurface ChemistrySurface SciencePlanarization EffectSurface TreatmentChemistrySurface Action MechanismSurface PolishingSurface Processing