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Study on the film forming mechanism, corrosion inhibition effect and synergistic action of two different inhibitors on copper surface chemical mechanical polishing for GLSI

Materials EngineeringMaterials ScienceChemical EngineeringCorrosion ProtectionCorrosion Inhibition EffectEngineeringCorrosionSurface ScienceSynergistic ActionSurface TreatmentDifferent InhibitorsChemistrySurface PolishingCorrosion ResistanceCorrosion Inhibition