Qiuliang Luo

Modification of the Preston equation for the chemical–mechanical polishing of copper

Qiuliang Luo, S. Ramarajan, S. V. Babu · Thin Solid Films · 1998 · 167 citations

Materials Science, Materials Engineering, Chemical Engineering +8

Copper Dissolution in Aqueous Ammonia-Containing Media during Chemical Mechanical Polishing

Qiuliang Luo, Raymond A. Mackay, S. V. Babu · Chemistry of Materials · 1997 · 92 citations

Engineering, Copper Dissolution, Chemistry +17

Chemical–mechanical polishing of copper in alkaline media

Qiuliang Luo, Daniel Campbell, S. V. Babu · Thin Solid Films · 1997 · 89 citations

Materials Engineering, Materials Science, Chemical Engineering +7

Stabilization of Alumina Slurry for Chemical−Mechanical Polishing of Copper

Qiuliang Luo, David R. Campbell, S. V. Babu · Langmuir · 1996 · 62 citations

Engineering, Mechanical Engineering, Alumina Particles +16

Dishing Effects during Chemical Mechanical Polishing of Copper in Acidic Media

Qiuliang Luo, S. V. Babu · Journal of The Electrochemical Society · 2000 · 35 citations

Engineering, Mechanical Engineering, Acidic Copper +19