Modification of the Preston equation for the chemical–mechanical polishing of copper - Concepedia

Concepedia

Publication | Closed Access

Modification of the Preston equation for the chemical–mechanical polishing of copper

167

Citations

23

References

1998

Year

Qiuliang Luo, S. Ramarajan, S. V. Babu

Thin Solid Films

Materials ScienceMaterials EngineeringChemical EngineeringPreston EquationEngineeringMaterial ProcessingMechanical EngineeringMetallurgical ProcessMicrostructureMetal ProcessingChemical–mechanical Polishing

References

	Year	Citations

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