Modification of the Preston equation for the chemical–mechanical polishing of copper

Chemical processes in glass polishing

Lee M. Cook · Journal of Non-Crystalline Solids · 1990 · 989 citations

Natural Sciences, Chemistry, Materials Science +11

Reflection infra-red studies of films formed by benzotriazole on Cu

G. W. Poling · Corrosion Science · 1970 · 422 citations

Natural Sciences, Materials Science, Physics +10

Copper Corrosion With and Without Inhibitors

V. Brusić, Margaret A. Frisch, Benjamin N. Eldridge et al. · Journal of The Electrochemical Society · 1991 · 312 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Copper interconnection integration and reliability

C.‐K. Hu, B. M. Luther, F. B. Kaufman et al. · Thin Solid Films · 1995 · 224 citations

Engineering, Electrical Engineering, Materials Science +12

Benzotriazole as a Corrosion Inhibitor for Immersed Copper

Robert A. Walker · CORROSION · 1973 · 149 citations

Natural Sciences, Materials Engineering, Materials Science +15