Yanan Lu

Surface action mechanism and planarization effect of sarcosine as an auxiliary complexing agent in copper film chemical mechanical polishing

Jiakai Zhou, Xinhuan Niu, Chenghui Yang et al. · Applied Surface Science · 2020 · 88 citations

Materials Science, Chemical Engineering, Auxiliary Complexing Agent +11

Effect of Potassium Persulfate as an Additive On Chemical Mechanical Polishing Performance on C-, A- and R-Plane Sapphire

Yanan Lu, Xinhuan Niu, Chenghui Yang et al. · ECS Journal of Solid State Science and Technology · 2020 · 28 citations · Full text

Materials Science, Materials Engineering, Chemical Engineering +14

Synergistic Action Mechanism and Effect of Ammonium Dodecyl Sulfate and 1,2,4-triazole in Alkaline Slurry on Step Height Reduction for Cu CMP

Chenghui Yang, Xinhuan Niu, Jiakai Zhou et al. · ECS Journal of Solid State Science and Technology · 2020 · 26 citations · Full text

Background Slurry, Engineering, Cu Cmp +17

Enhanced permeability of ZnO/PE films by stretching and its application in Pakchoi preservation

Wenya Ma, Yanan Lu, Yong Liu et al. · Food Packaging and Shelf Life · 2024 · 22 citations

Preparation and Molecular Structural Characterization of Fulvic Acid Extracted from Different Types of Peat

Di Wu, Yanan Lu, Litong Ma et al. · Molecules · 2023 · 21 citations · Full text