Concepedia

Planarization

Planarization is a substrate preparation technique in MEMS fabrication that belongs to the class of surface modification processes, distinguished by its specific function of achieving a flat, uniform surface topology to enhance subsequent lithographic precision and layer adhesion.

960

Publications

39.7K

Citations

3.8K

Authors

745

Institutions

Publications per year

2017–2026

188

Parents

Publications

960

Enhanced Emission and Its Switching in Fluorescent Organic Nanoparticles

Byeong‐Kwan An, Soon‐Ki Kwon, Sang-Don Jung et al. · Journal of the American Chemical Society · 2002 · 1.9K citations

, , +13

ASAP7: A 7-nm finFET predictive process design kit

Lawrence T. Clark, Vinay Vashishtha, L. Shifren et al. · Microelectronics Journal · 2016 · 736 citations · Full text

, , +13

Chemical mechanical planarization for microelectronics applications

Parshuram B. Zantye, Ashok Kumar, A. K. Sikder · Materials Science and Engineering R Reports · 2004 · 612 citations

, , +14

Converting Ceria Polyhedral Nanoparticles into Single-Crystal Nanospheres

Xiangdong Feng, Dean C. Sayle, Zhong Lin Wang et al. · Science · 2006 · 611 citations · Full text

, , +17

Step and flash imprint lithography: a new approach to high-resolution patterning

Matthew Colburn, Stephen C. Johnson, M. D. Stewart et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 564 citations

, , +16

1–5 of 960

Authors

3.8K

  1. SV
    S. V. Babu

    Clarkson University, United States

    29 publications · 1.3K citations

    22

    h-index

  2. DR
    D. Roy

    Clarkson University, United States

    25 publications · 947 citations

    19

    h-index

  3. AP
    Ara Philipossian

    University of Arizona, United States

    23 publications · 682 citations

    18

    h-index

  4. DS
    Duane S. Boning

    Massachusetts Institute of Technology, United States

    13 publications · 571 citations

    12

    h-index

  5. JP
    Jea‐Gun Park

    Hanyang University, South Korea

    11 publications · 245 citations

    11

    h-index

1–5 of 3.8K

Institutions

745

  1. Clarkson University

    Potsdam, United States

    27 h-index

    129 publications

    4.8K citations

  2. Hanyang University

    Seoul, South Korea

    18 h-index

    100 publications

    2.9K citations

  3. University of Arizona

    Tucson, United States

    18 h-index

    78 publications

    2.5K citations

  4. Massachusetts Institute of Technology

    Cambridge, United States

    18 h-index

    79 publications

    4.3K citations

  5. Materials Processing (United States)

    Irving, United States

    16 h-index

    40 publications

    2.3K citations

  6. IBM (United States)

    Armonk, United States

    16 h-index

    87 publications

    2.4K citations

  7. Tsinghua University

    Beijing, China

    16 h-index

    86 publications

    4K citations

  8. Chinese Academy of Sciences

    Beijing, China

    15 h-index

    101 publications

    4.1K citations

1–8 of 745

Venues

  1. Journal of The Electrochemical Society

    JES · 109 publications · 4.4K citations

    40

    h-index

  2. ECS Journal of Solid State Science and Technology

    JSS · 38 publications · 822 citations

    19

    h-index

  3. Journal of the American Chemical Society

    JACS · 18 publications · 3.2K citations

    18

    h-index

  4. Japanese Journal of Applied Physics

    JJAP · 44 publications · 889 citations

    18

    h-index

  5. Applied Physics Letters

    23 publications · 943 citations

    17

    h-index

1–5