Chemical mechanical planarization for microelectronics applications - Concepedia

Concepedia

Publication | Closed Access

Chemical mechanical planarization for microelectronics applications

600

Citations

172

References

2004

Year

Parshuram B. Zantye, Ashok Kumar, A. K. Sikder

Materials Science and Engineering R Reports

Materials ScienceEngineeringMicrofabricationMechanical EngineeringNano Electro Mechanical SystemMicroscale SystemMicroelectronicsChemical Mechanical Planarization

References

	Year	Citations

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