Concepedia
Statistics
Publications
62
Citations
2.4K
H-Index
31
Active since
1998
Affiliations
The University of Osaka(Current)
Ebara (Japan)
Kumamoto University
National Institute of Advanced Industrial Science and Technology
Lawrence Berkeley National Laboratory
Kenta Arima is an author at The University of Osaka specializing in materials science, materials engineering, and surface science.
Publications per year
1998–2023
Single-nanometer focusing of hard x-rays by Kirkpatrick–Baez mirrors
Kazuto Yamauchi, Hidekazu Mimura, Takashi Kimura et al. · Journal of Physics Condensed Matter · 2011 · 155 citations
Natural Sciences, Physics, Nanomaterials +14
Novel abrasive-free planarization of 4H-SiC (0001) using catalyst
Hideyuki Hara, Yasuhisa Sano, Hidekazu Mimura et al. · Journal of Electronic Materials · 2006 · 138 citations
Natural Sciences, Materials Engineering, Materials Science +12
Highly efficient planarization of sliced 4H–SiC (0001) wafer by slurryless electrochemical mechanical polishing
Xu Yang, Xiaozhe Yang, Kentaro Kawai et al. · International Journal of Machine Tools and Manufacture · 2019 · 106 citations
Engineering, Materials Engineering, Materials Science +17
Atomic-scale flattening of SiC surfaces by electroless chemical etching in HF solution with Pt catalyst
Kenta Arima, Hideyuki Hara, Junji Murata et al. · Applied Physics Letters · 2007 · 93 citations · Full text
Natural Sciences, Chemistry, Materials Science +17
Investigation of anodic oxidation mechanism of 4H-SiC (0001) for electrochemical mechanical polishing
Xu Yang, Rongyan Sun, Yuji Ohkubo et al. · Electrochimica Acta · 2018 · 84 citations
Natural Sciences, Materials Engineering, Materials Science +13
1–5 of 62