Novel abrasive-free planarization of 4H-SiC (0001) using catalyst - Concepedia

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Novel abrasive-free planarization of 4H-SiC (0001) using catalyst

133

Citations

11

References

2006

Year

Hideyuki Hara, Yasuhisa Sano, Hidekazu Mimura, Kenta Arima, Akihisa Kubota, Keita Yagi, Junji Murata, Kazuto Yamauch

Journal of Electronic Materials

Materials EngineeringMaterials ScienceChemical EngineeringCatalytic MaterialEngineeringNanoelectronicsNovel Abrasive-free PlanarizationCeramic SynthesisCarbide

References

	Year	Citations

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