Novel abrasive-free planarization of 4H-SiC (0001) using catalyst

Chemomechanical Polishing of Silicon Carbide

Ling Zhou, V. Audurier, Pirouz Pirouz et al. · Journal of The Electrochemical Society · 1997 · 211 citations

Engineering, Materials Engineering, Materials Science +17

Long-range structural effects in the anomalous voltammetry on ultra-high vacuum prepared Pt (111)

Frederick T. Wagner, P.N. Ross · Journal of Electroanalytical Chemistry · 1988 · 157 citations · Full text

Natural Sciences, Chemistry, Materials Science +14

Process-Induced Morphological Defects in Epitaxial CVD Silicon Carbide

J. A. Powell, David Larkin · physica status solidi (b) · 1997 · 127 citations

Engineering, Materials Engineering, Materials Science +17

Development of plasma chemical vaporization machining

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura et al. · Review of Scientific Instruments · 2000 · 125 citations

Engineering, Materials Engineering, Materials Science +17

Removal of polishing-induced damage from 6H-SiC(0001) substrates by hydrogen etching

Fredrik Owman, C. Hallin, Per Mårtensson et al. · Journal of Crystal Growth · 1996 · 122 citations

Natural Sciences, Materials Engineering, Materials Science +12